MSE 5411

Nanofabrication and Characterization of Electronics Laboratory

Course Description

Course information provided by the 2024-2025 Catalog. Courses of Study 2024-2025 is scheduled to publish mid-June.

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.

Prerequisites/Corequisites Prerequisite or corequisite: ECE 4360/MSE 5410, AEP 6620 or equivalents.

Last 4 Terms Offered 2025SP, 2024FA, 2024SP, 2023FA

When Offered Fall.

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